JPS4979479A - - Google Patents

Info

Publication number
JPS4979479A
JPS4979479A JP47121566A JP12156672A JPS4979479A JP S4979479 A JPS4979479 A JP S4979479A JP 47121566 A JP47121566 A JP 47121566A JP 12156672 A JP12156672 A JP 12156672A JP S4979479 A JPS4979479 A JP S4979479A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47121566A
Other languages
Japanese (ja)
Other versions
JPS5633864B2 (US20100170793A1-20100708-C00006.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12156672A priority Critical patent/JPS5633864B2/ja
Priority to US421651A priority patent/US3920484A/en
Publication of JPS4979479A publication Critical patent/JPS4979479A/ja
Publication of JPS5633864B2 publication Critical patent/JPS5633864B2/ja
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H01L27/06Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
    • H01L27/0611Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
    • H01L27/0617Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type
    • H01L27/0623Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region comprising components of the field-effect type in combination with bipolar transistors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8248Combination of bipolar and field-effect technology
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8248Combination of bipolar and field-effect technology
    • H01L21/8249Bipolar and MOS technology

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Bipolar Transistors (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Element Separation (AREA)
JP12156672A 1972-12-06 1972-12-06 Expired JPS5633864B2 (US20100170793A1-20100708-C00006.png)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP12156672A JPS5633864B2 (US20100170793A1-20100708-C00006.png) 1972-12-06 1972-12-06
US421651A US3920484A (en) 1972-12-06 1973-12-04 Method of manufacturing semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12156672A JPS5633864B2 (US20100170793A1-20100708-C00006.png) 1972-12-06 1972-12-06

Publications (2)

Publication Number Publication Date
JPS4979479A true JPS4979479A (US20100170793A1-20100708-C00006.png) 1974-07-31
JPS5633864B2 JPS5633864B2 (US20100170793A1-20100708-C00006.png) 1981-08-06

Family

ID=14814393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12156672A Expired JPS5633864B2 (US20100170793A1-20100708-C00006.png) 1972-12-06 1972-12-06

Country Status (2)

Country Link
US (1) US3920484A (US20100170793A1-20100708-C00006.png)
JP (1) JPS5633864B2 (US20100170793A1-20100708-C00006.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5190277A (en) * 1975-02-05 1976-08-07 Handotaisochino seizohoho
JPH01186673A (ja) * 1988-01-14 1989-07-26 Hitachi Ltd 半導体装置

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2537559C3 (de) * 1975-08-22 1978-05-03 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zur Herstellung einer monolithisch integrierten Halbleiterschaltung mit einem Junction-Feldeffekttransistor und einem komplementären MIS-Feldeffekttransistor
EP0057549B1 (en) * 1981-01-29 1987-07-29 Kabushiki Kaisha Toshiba Semiconductor device
EP0067661A1 (en) * 1981-06-15 1982-12-22 Kabushiki Kaisha Toshiba Semiconductor device and method for manufacturing the same
US5298462A (en) * 1984-11-30 1994-03-29 Robert Bosch Gmbh Method of making metallization for semiconductor device
KR890004420B1 (ko) * 1986-11-04 1989-11-03 삼성반도체통신 주식회사 반도체 바이 씨 모오스장치의 제조방법
DE4303768C2 (de) * 1992-02-14 1995-03-09 Mitsubishi Electric Corp Halbleitervorrichtung mit einem bipolaren Transistor und einem Feldeffekttransistor und Verfahren zu deren Herstellung

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3609479A (en) * 1968-02-29 1971-09-28 Westinghouse Electric Corp Semiconductor integrated circuit having mis and bipolar transistor elements

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3749610A (en) * 1971-01-11 1973-07-31 Itt Production of silicon insulated gate and ion implanted field effect transistor
US3756861A (en) * 1972-03-13 1973-09-04 Bell Telephone Labor Inc Bipolar transistors and method of manufacture

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3609479A (en) * 1968-02-29 1971-09-28 Westinghouse Electric Corp Semiconductor integrated circuit having mis and bipolar transistor elements

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5190277A (en) * 1975-02-05 1976-08-07 Handotaisochino seizohoho
JPH01186673A (ja) * 1988-01-14 1989-07-26 Hitachi Ltd 半導体装置

Also Published As

Publication number Publication date
US3920484A (en) 1975-11-18
JPS5633864B2 (US20100170793A1-20100708-C00006.png) 1981-08-06

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