JPS4979472A - - Google Patents
Info
- Publication number
- JPS4979472A JPS4979472A JP47121575A JP12157572A JPS4979472A JP S4979472 A JPS4979472 A JP S4979472A JP 47121575 A JP47121575 A JP 47121575A JP 12157572 A JP12157572 A JP 12157572A JP S4979472 A JPS4979472 A JP S4979472A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70591—Testing optical components
- G03F7/706—Aberration measurement
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP47121575A JPS4979472A (fr) | 1972-12-06 | 1972-12-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP47121575A JPS4979472A (fr) | 1972-12-06 | 1972-12-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4979472A true JPS4979472A (fr) | 1974-07-31 |
Family
ID=14814618
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP47121575A Pending JPS4979472A (fr) | 1972-12-06 | 1972-12-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4979472A (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1995010849A1 (fr) * | 1993-10-13 | 1995-04-20 | Oki Electric Industry Co., Ltd. | Motif et procede d'evaluation d'un foyer |
US7757404B2 (en) | 2004-05-27 | 2010-07-20 | Panasonic Electric Works Co., Ltd. | Personal trimming system |
-
1972
- 1972-12-06 JP JP47121575A patent/JPS4979472A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1995010849A1 (fr) * | 1993-10-13 | 1995-04-20 | Oki Electric Industry Co., Ltd. | Motif et procede d'evaluation d'un foyer |
US7757404B2 (en) | 2004-05-27 | 2010-07-20 | Panasonic Electric Works Co., Ltd. | Personal trimming system |