JPS4979472A - - Google Patents

Info

Publication number
JPS4979472A
JPS4979472A JP47121575A JP12157572A JPS4979472A JP S4979472 A JPS4979472 A JP S4979472A JP 47121575 A JP47121575 A JP 47121575A JP 12157572 A JP12157572 A JP 12157572A JP S4979472 A JPS4979472 A JP S4979472A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP47121575A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47121575A priority Critical patent/JPS4979472A/ja
Publication of JPS4979472A publication Critical patent/JPS4979472A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70591—Testing optical components
    • G03F7/706—Aberration measurement
JP47121575A 1972-12-06 1972-12-06 Pending JPS4979472A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47121575A JPS4979472A (en) 1972-12-06 1972-12-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47121575A JPS4979472A (en) 1972-12-06 1972-12-06

Publications (1)

Publication Number Publication Date
JPS4979472A true JPS4979472A (en) 1974-07-31

Family

ID=14814618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47121575A Pending JPS4979472A (en) 1972-12-06 1972-12-06

Country Status (1)

Country Link
JP (1) JPS4979472A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995010849A1 (en) * 1993-10-13 1995-04-20 Oki Electric Industry Co., Ltd. Pattern and method for evaluating focal point
US7757404B2 (en) 2004-05-27 2010-07-20 Panasonic Electric Works Co., Ltd. Personal trimming system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995010849A1 (en) * 1993-10-13 1995-04-20 Oki Electric Industry Co., Ltd. Pattern and method for evaluating focal point
US7757404B2 (en) 2004-05-27 2010-07-20 Panasonic Electric Works Co., Ltd. Personal trimming system

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