JPS4979373A - - Google Patents
Info
- Publication number
- JPS4979373A JPS4979373A JP11974972A JP11974972A JPS4979373A JP S4979373 A JPS4979373 A JP S4979373A JP 11974972 A JP11974972 A JP 11974972A JP 11974972 A JP11974972 A JP 11974972A JP S4979373 A JPS4979373 A JP S4979373A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11974972A JPS4979373A (cs) | 1972-11-29 | 1972-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11974972A JPS4979373A (cs) | 1972-11-29 | 1972-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4979373A true JPS4979373A (cs) | 1974-07-31 |
Family
ID=14769182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11974972A Pending JPS4979373A (cs) | 1972-11-29 | 1972-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4979373A (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01316458A (ja) * | 1988-06-16 | 1989-12-21 | Ulvac Corp | 真空処理装置における物品搬送装置 |
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1972
- 1972-11-29 JP JP11974972A patent/JPS4979373A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01316458A (ja) * | 1988-06-16 | 1989-12-21 | Ulvac Corp | 真空処理装置における物品搬送装置 |