JPS4979177A - - Google Patents
Info
- Publication number
- JPS4979177A JPS4979177A JP47120626A JP12062672A JPS4979177A JP S4979177 A JPS4979177 A JP S4979177A JP 47120626 A JP47120626 A JP 47120626A JP 12062672 A JP12062672 A JP 12062672A JP S4979177 A JPS4979177 A JP S4979177A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47120626A JPS4979177A (enExample) | 1972-12-04 | 1972-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47120626A JPS4979177A (enExample) | 1972-12-04 | 1972-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4979177A true JPS4979177A (enExample) | 1974-07-31 |
Family
ID=14790870
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47120626A Pending JPS4979177A (enExample) | 1972-12-04 | 1972-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4979177A (enExample) |
-
1972
- 1972-12-04 JP JP47120626A patent/JPS4979177A/ja active Pending