JPS4976977A - - Google Patents

Info

Publication number
JPS4976977A
JPS4976977A JP47118333A JP11833372A JPS4976977A JP S4976977 A JPS4976977 A JP S4976977A JP 47118333 A JP47118333 A JP 47118333A JP 11833372 A JP11833372 A JP 11833372A JP S4976977 A JPS4976977 A JP S4976977A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP47118333A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47118333A priority Critical patent/JPS4976977A/ja
Publication of JPS4976977A publication Critical patent/JPS4976977A/ja
Pending legal-status Critical Current

Links

JP47118333A 1972-11-24 1972-11-24 Pending JPS4976977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47118333A JPS4976977A (en) 1972-11-24 1972-11-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47118333A JPS4976977A (en) 1972-11-24 1972-11-24

Publications (1)

Publication Number Publication Date
JPS4976977A true JPS4976977A (en) 1974-07-24

Family

ID=14734052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47118333A Pending JPS4976977A (en) 1972-11-24 1972-11-24

Country Status (1)

Country Link
JP (1) JPS4976977A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10410872B2 (en) 2016-09-13 2019-09-10 Applied Materials, Inc. Borane mediated dehydrogenation process from silane and alkylsilane species for spacer and hardmask application

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4958179A (en) * 1972-10-06 1974-06-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4958179A (en) * 1972-10-06 1974-06-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10410872B2 (en) 2016-09-13 2019-09-10 Applied Materials, Inc. Borane mediated dehydrogenation process from silane and alkylsilane species for spacer and hardmask application

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