JPS4976737A - - Google Patents

Info

Publication number
JPS4976737A
JPS4976737A JP11798872A JP11798872A JPS4976737A JP S4976737 A JPS4976737 A JP S4976737A JP 11798872 A JP11798872 A JP 11798872A JP 11798872 A JP11798872 A JP 11798872A JP S4976737 A JPS4976737 A JP S4976737A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11798872A
Other languages
Japanese (ja)
Other versions
JPS526855B2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11798872A priority Critical patent/JPS526855B2/ja
Publication of JPS4976737A publication Critical patent/JPS4976737A/ja
Publication of JPS526855B2 publication Critical patent/JPS526855B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP11798872A 1972-11-27 1972-11-27 Expired JPS526855B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11798872A JPS526855B2 (enExample) 1972-11-27 1972-11-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11798872A JPS526855B2 (enExample) 1972-11-27 1972-11-27

Publications (2)

Publication Number Publication Date
JPS4976737A true JPS4976737A (enExample) 1974-07-24
JPS526855B2 JPS526855B2 (enExample) 1977-02-25

Family

ID=14725228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11798872A Expired JPS526855B2 (enExample) 1972-11-27 1972-11-27

Country Status (1)

Country Link
JP (1) JPS526855B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57150391U (enExample) * 1981-03-11 1982-09-21

Also Published As

Publication number Publication date
JPS526855B2 (enExample) 1977-02-25

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