JPS4976479A - - Google Patents

Info

Publication number
JPS4976479A
JPS4976479A JP47117969A JP11796972A JPS4976479A JP S4976479 A JPS4976479 A JP S4976479A JP 47117969 A JP47117969 A JP 47117969A JP 11796972 A JP11796972 A JP 11796972A JP S4976479 A JPS4976479 A JP S4976479A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP47117969A
Other languages
Japanese (ja)
Other versions
JPS5548694B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11796972A priority Critical patent/JPS5548694B2/ja
Publication of JPS4976479A publication Critical patent/JPS4976479A/ja
Publication of JPS5548694B2 publication Critical patent/JPS5548694B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP11796972A 1972-11-27 1972-11-27 Expired JPS5548694B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11796972A JPS5548694B2 (enrdf_load_stackoverflow) 1972-11-27 1972-11-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11796972A JPS5548694B2 (enrdf_load_stackoverflow) 1972-11-27 1972-11-27

Publications (2)

Publication Number Publication Date
JPS4976479A true JPS4976479A (enrdf_load_stackoverflow) 1974-07-23
JPS5548694B2 JPS5548694B2 (enrdf_load_stackoverflow) 1980-12-08

Family

ID=14724744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11796972A Expired JPS5548694B2 (enrdf_load_stackoverflow) 1972-11-27 1972-11-27

Country Status (1)

Country Link
JP (1) JPS5548694B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009206335A (ja) * 2008-02-28 2009-09-10 Hayashi Junyaku Kogyo Kk シリコン異方性エッチング液組成物

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009206335A (ja) * 2008-02-28 2009-09-10 Hayashi Junyaku Kogyo Kk シリコン異方性エッチング液組成物

Also Published As

Publication number Publication date
JPS5548694B2 (enrdf_load_stackoverflow) 1980-12-08

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