JPS4974884A - - Google Patents
Info
- Publication number
- JPS4974884A JPS4974884A JP11589772A JP11589772A JPS4974884A JP S4974884 A JPS4974884 A JP S4974884A JP 11589772 A JP11589772 A JP 11589772A JP 11589772 A JP11589772 A JP 11589772A JP S4974884 A JPS4974884 A JP S4974884A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11589772A JPS539713B2 (xx) | 1972-11-18 | 1972-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11589772A JPS539713B2 (xx) | 1972-11-18 | 1972-11-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4974884A true JPS4974884A (xx) | 1974-07-19 |
| JPS539713B2 JPS539713B2 (xx) | 1978-04-07 |
Family
ID=14673892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11589772A Expired JPS539713B2 (xx) | 1972-11-18 | 1972-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS539713B2 (xx) |
-
1972
- 1972-11-18 JP JP11589772A patent/JPS539713B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS539713B2 (xx) | 1978-04-07 |