JPS4974632A - - Google Patents
Info
- Publication number
- JPS4974632A JPS4974632A JP11618672A JP11618672A JPS4974632A JP S4974632 A JPS4974632 A JP S4974632A JP 11618672 A JP11618672 A JP 11618672A JP 11618672 A JP11618672 A JP 11618672A JP S4974632 A JPS4974632 A JP S4974632A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11618672A JPS4974632A (ja) | 1972-11-21 | 1972-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11618672A JPS4974632A (ja) | 1972-11-21 | 1972-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4974632A true JPS4974632A (ja) | 1974-07-18 |
Family
ID=14680932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11618672A Pending JPS4974632A (ja) | 1972-11-21 | 1972-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4974632A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5209816A (en) * | 1992-06-04 | 1993-05-11 | Micron Technology, Inc. | Method of chemical mechanical polishing aluminum containing metal layers and slurry for chemical mechanical polishing |
-
1972
- 1972-11-21 JP JP11618672A patent/JPS4974632A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5209816A (en) * | 1992-06-04 | 1993-05-11 | Micron Technology, Inc. | Method of chemical mechanical polishing aluminum containing metal layers and slurry for chemical mechanical polishing |
| JPH0669187A (ja) * | 1992-06-04 | 1994-03-11 | Micron Technol Inc | 半導体処理方法 |