JPS4972072A - - Google Patents

Info

Publication number
JPS4972072A
JPS4972072A JP11620572A JP11620572A JPS4972072A JP S4972072 A JPS4972072 A JP S4972072A JP 11620572 A JP11620572 A JP 11620572A JP 11620572 A JP11620572 A JP 11620572A JP S4972072 A JPS4972072 A JP S4972072A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11620572A
Other languages
Japanese (ja)
Other versions
JPS5515305B2 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11620572A priority Critical patent/JPS5515305B2/ja
Publication of JPS4972072A publication Critical patent/JPS4972072A/ja
Publication of JPS5515305B2 publication Critical patent/JPS5515305B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Accessory Devices And Overall Control Thereof (AREA)
JP11620572A 1972-11-21 1972-11-21 Expired JPS5515305B2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11620572A JPS5515305B2 (fr) 1972-11-21 1972-11-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11620572A JPS5515305B2 (fr) 1972-11-21 1972-11-21

Publications (2)

Publication Number Publication Date
JPS4972072A true JPS4972072A (fr) 1974-07-11
JPS5515305B2 JPS5515305B2 (fr) 1980-04-22

Family

ID=14681427

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11620572A Expired JPS5515305B2 (fr) 1972-11-21 1972-11-21

Country Status (1)

Country Link
JP (1) JPS5515305B2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5946381A (ja) * 1982-09-07 1984-03-15 Nippon Telegr & Teleph Corp <Ntt> 極高真空排気法
JPS62126580U (fr) * 1987-01-05 1987-08-11

Also Published As

Publication number Publication date
JPS5515305B2 (fr) 1980-04-22

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