JPS4968672A - - Google Patents
Info
- Publication number
- JPS4968672A JPS4968672A JP11031772A JP11031772A JPS4968672A JP S4968672 A JPS4968672 A JP S4968672A JP 11031772 A JP11031772 A JP 11031772A JP 11031772 A JP11031772 A JP 11031772A JP S4968672 A JPS4968672 A JP S4968672A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11031772A JPS529511B2 (cs) | 1972-11-06 | 1972-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11031772A JPS529511B2 (cs) | 1972-11-06 | 1972-11-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4968672A true JPS4968672A (cs) | 1974-07-03 |
| JPS529511B2 JPS529511B2 (cs) | 1977-03-16 |
Family
ID=14532639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11031772A Expired JPS529511B2 (cs) | 1972-11-06 | 1972-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS529511B2 (cs) |
-
1972
- 1972-11-06 JP JP11031772A patent/JPS529511B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS529511B2 (cs) | 1977-03-16 |