JPS4967880A - - Google Patents

Info

Publication number
JPS4967880A
JPS4967880A JP10941972A JP10941972A JPS4967880A JP S4967880 A JPS4967880 A JP S4967880A JP 10941972 A JP10941972 A JP 10941972A JP 10941972 A JP10941972 A JP 10941972A JP S4967880 A JPS4967880 A JP S4967880A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10941972A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10941972A priority Critical patent/JPS4967880A/ja
Publication of JPS4967880A publication Critical patent/JPS4967880A/ja
Pending legal-status Critical Current

Links

JP10941972A 1972-11-02 1972-11-02 Pending JPS4967880A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10941972A JPS4967880A (en) 1972-11-02 1972-11-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10941972A JPS4967880A (en) 1972-11-02 1972-11-02

Publications (1)

Publication Number Publication Date
JPS4967880A true JPS4967880A (en) 1974-07-01

Family

ID=14509756

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10941972A Pending JPS4967880A (en) 1972-11-02 1972-11-02

Country Status (1)

Country Link
JP (1) JPS4967880A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53106758U (en) * 1976-06-23 1978-08-28
JPS58145117A (en) * 1982-02-23 1983-08-29 Toshiba Corp Manufacturing apparatus of semiconductor
JPH02279589A (en) * 1989-04-19 1990-11-15 Sumitomo Metal Ind Ltd Vapor growth device
JP2010219345A (en) * 2009-03-17 2010-09-30 Sharp Corp Vapor growth device and vapor growth method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53106758U (en) * 1976-06-23 1978-08-28
JPS58145117A (en) * 1982-02-23 1983-08-29 Toshiba Corp Manufacturing apparatus of semiconductor
JPH02279589A (en) * 1989-04-19 1990-11-15 Sumitomo Metal Ind Ltd Vapor growth device
JP2010219345A (en) * 2009-03-17 2010-09-30 Sharp Corp Vapor growth device and vapor growth method

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