JPS4966953U - - Google Patents
Info
- Publication number
- JPS4966953U JPS4966953U JP11365772U JP11365772U JPS4966953U JP S4966953 U JPS4966953 U JP S4966953U JP 11365772 U JP11365772 U JP 11365772U JP 11365772 U JP11365772 U JP 11365772U JP S4966953 U JPS4966953 U JP S4966953U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11365772U JPS5221331Y2 (is) | 1972-09-30 | 1972-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11365772U JPS5221331Y2 (is) | 1972-09-30 | 1972-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4966953U true JPS4966953U (is) | 1974-06-11 |
| JPS5221331Y2 JPS5221331Y2 (is) | 1977-05-16 |
Family
ID=28342672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11365772U Expired JPS5221331Y2 (is) | 1972-09-30 | 1972-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5221331Y2 (is) |
-
1972
- 1972-09-30 JP JP11365772U patent/JPS5221331Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5221331Y2 (is) | 1977-05-16 |