JPS4966277A - - Google Patents

Info

Publication number
JPS4966277A
JPS4966277A JP10921872A JP10921872A JPS4966277A JP S4966277 A JPS4966277 A JP S4966277A JP 10921872 A JP10921872 A JP 10921872A JP 10921872 A JP10921872 A JP 10921872A JP S4966277 A JPS4966277 A JP S4966277A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10921872A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10921872A priority Critical patent/JPS4966277A/ja
Publication of JPS4966277A publication Critical patent/JPS4966277A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP10921872A 1972-10-31 1972-10-31 Pending JPS4966277A (show.php)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10921872A JPS4966277A (show.php) 1972-10-31 1972-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10921872A JPS4966277A (show.php) 1972-10-31 1972-10-31

Publications (1)

Publication Number Publication Date
JPS4966277A true JPS4966277A (show.php) 1974-06-27

Family

ID=14504578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10921872A Pending JPS4966277A (show.php) 1972-10-31 1972-10-31

Country Status (1)

Country Link
JP (1) JPS4966277A (show.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635426A (en) * 1979-08-31 1981-04-08 Fujitsu Ltd Vapor-phase epitaxial growth device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635426A (en) * 1979-08-31 1981-04-08 Fujitsu Ltd Vapor-phase epitaxial growth device

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