JPS4966223U - - Google Patents
Info
- Publication number
- JPS4966223U JPS4966223U JP10874172U JP10874172U JPS4966223U JP S4966223 U JPS4966223 U JP S4966223U JP 10874172 U JP10874172 U JP 10874172U JP 10874172 U JP10874172 U JP 10874172U JP S4966223 U JPS4966223 U JP S4966223U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10874172U JPS4966223U (en) | 1972-09-19 | 1972-09-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10874172U JPS4966223U (en) | 1972-09-19 | 1972-09-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4966223U true JPS4966223U (en) | 1974-06-10 |
Family
ID=28328930
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10874172U Pending JPS4966223U (en) | 1972-09-19 | 1972-09-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4966223U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20240031105A (en) | 2022-08-30 | 2024-03-07 | 도쿄엘렉트론가부시키가이샤 | Substrate processing apparatus and substrate processing method |
KR20240031104A (en) | 2022-08-30 | 2024-03-07 | 도쿄엘렉트론가부시키가이샤 | Substrate processing apparatus and substrate processing method |
-
1972
- 1972-09-19 JP JP10874172U patent/JPS4966223U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20240031105A (en) | 2022-08-30 | 2024-03-07 | 도쿄엘렉트론가부시키가이샤 | Substrate processing apparatus and substrate processing method |
KR20240031104A (en) | 2022-08-30 | 2024-03-07 | 도쿄엘렉트론가부시키가이샤 | Substrate processing apparatus and substrate processing method |