JPS4966066A - - Google Patents
Info
- Publication number
- JPS4966066A JPS4966066A JP10722472A JP10722472A JPS4966066A JP S4966066 A JPS4966066 A JP S4966066A JP 10722472 A JP10722472 A JP 10722472A JP 10722472 A JP10722472 A JP 10722472A JP S4966066 A JPS4966066 A JP S4966066A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10722472A JPS4966066A (enExample) | 1972-10-27 | 1972-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10722472A JPS4966066A (enExample) | 1972-10-27 | 1972-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4966066A true JPS4966066A (enExample) | 1974-06-26 |
Family
ID=14453626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10722472A Pending JPS4966066A (enExample) | 1972-10-27 | 1972-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4966066A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5123071A (en) * | 1974-08-20 | 1976-02-24 | Matsushita Electronics Corp | Handotaisochino seizoho |
| JPS5331973A (en) * | 1976-09-06 | 1978-03-25 | Nippon Telegr & Teleph Corp <Ntt> | Wafer holder |
-
1972
- 1972-10-27 JP JP10722472A patent/JPS4966066A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5123071A (en) * | 1974-08-20 | 1976-02-24 | Matsushita Electronics Corp | Handotaisochino seizoho |
| JPS5331973A (en) * | 1976-09-06 | 1978-03-25 | Nippon Telegr & Teleph Corp <Ntt> | Wafer holder |