JPS4965786A - - Google Patents

Info

Publication number
JPS4965786A
JPS4965786A JP10721172A JP10721172A JPS4965786A JP S4965786 A JPS4965786 A JP S4965786A JP 10721172 A JP10721172 A JP 10721172A JP 10721172 A JP10721172 A JP 10721172A JP S4965786 A JPS4965786 A JP S4965786A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10721172A
Other languages
Japanese (ja)
Other versions
JPS5132539B2 (index.php
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47107211A priority Critical patent/JPS5132539B2/ja
Publication of JPS4965786A publication Critical patent/JPS4965786A/ja
Publication of JPS5132539B2 publication Critical patent/JPS5132539B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP47107211A 1972-10-27 1972-10-27 Expired JPS5132539B2 (index.php)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47107211A JPS5132539B2 (index.php) 1972-10-27 1972-10-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47107211A JPS5132539B2 (index.php) 1972-10-27 1972-10-27

Publications (2)

Publication Number Publication Date
JPS4965786A true JPS4965786A (index.php) 1974-06-26
JPS5132539B2 JPS5132539B2 (index.php) 1976-09-13

Family

ID=14453287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47107211A Expired JPS5132539B2 (index.php) 1972-10-27 1972-10-27

Country Status (1)

Country Link
JP (1) JPS5132539B2 (index.php)

Also Published As

Publication number Publication date
JPS5132539B2 (index.php) 1976-09-13

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