JPS4964535A - - Google Patents
Info
- Publication number
- JPS4964535A JPS4964535A JP10609072A JP10609072A JPS4964535A JP S4964535 A JPS4964535 A JP S4964535A JP 10609072 A JP10609072 A JP 10609072A JP 10609072 A JP10609072 A JP 10609072A JP S4964535 A JPS4964535 A JP S4964535A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Machine Tool Copy Controls (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10609072A JPS5540351B2 (https=) | 1972-10-23 | 1972-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10609072A JPS5540351B2 (https=) | 1972-10-23 | 1972-10-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4964535A true JPS4964535A (https=) | 1974-06-22 |
| JPS5540351B2 JPS5540351B2 (https=) | 1980-10-17 |
Family
ID=14424836
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10609072A Expired JPS5540351B2 (https=) | 1972-10-23 | 1972-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5540351B2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5455635U (https=) * | 1978-09-26 | 1979-04-17 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102455392B1 (ko) | 2018-07-30 | 2022-10-14 | 삼성전자주식회사 | 세정수 처리 장치, 플라즈마 리액션 탱크 및 세정수 처리 방법 |
-
1972
- 1972-10-23 JP JP10609072A patent/JPS5540351B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5455635U (https=) * | 1978-09-26 | 1979-04-17 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5540351B2 (https=) | 1980-10-17 |