JPS4964484A - - Google Patents

Info

Publication number
JPS4964484A
JPS4964484A JP10491072A JP10491072A JPS4964484A JP S4964484 A JPS4964484 A JP S4964484A JP 10491072 A JP10491072 A JP 10491072A JP 10491072 A JP10491072 A JP 10491072A JP S4964484 A JPS4964484 A JP S4964484A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10491072A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10491072A priority Critical patent/JPS4964484A/ja
Publication of JPS4964484A publication Critical patent/JPS4964484A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Examining Or Testing Airtightness (AREA)
JP10491072A 1972-10-20 1972-10-20 Pending JPS4964484A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10491072A JPS4964484A (enrdf_load_stackoverflow) 1972-10-20 1972-10-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10491072A JPS4964484A (enrdf_load_stackoverflow) 1972-10-20 1972-10-20

Publications (1)

Publication Number Publication Date
JPS4964484A true JPS4964484A (enrdf_load_stackoverflow) 1974-06-21

Family

ID=14393259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10491072A Pending JPS4964484A (enrdf_load_stackoverflow) 1972-10-20 1972-10-20

Country Status (1)

Country Link
JP (1) JPS4964484A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023523921A (ja) * 2020-04-24 2023-06-08 ラム リサーチ コーポレーション 分流レスガス投与

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023523921A (ja) * 2020-04-24 2023-06-08 ラム リサーチ コーポレーション 分流レスガス投与

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