JPS4964484A - - Google Patents
Info
- Publication number
- JPS4964484A JPS4964484A JP10491072A JP10491072A JPS4964484A JP S4964484 A JPS4964484 A JP S4964484A JP 10491072 A JP10491072 A JP 10491072A JP 10491072 A JP10491072 A JP 10491072A JP S4964484 A JPS4964484 A JP S4964484A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Volume Flow (AREA)
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10491072A JPS4964484A (cs) | 1972-10-20 | 1972-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10491072A JPS4964484A (cs) | 1972-10-20 | 1972-10-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4964484A true JPS4964484A (cs) | 1974-06-21 |
Family
ID=14393259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10491072A Pending JPS4964484A (cs) | 1972-10-20 | 1972-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4964484A (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023523921A (ja) * | 2020-04-24 | 2023-06-08 | ラム リサーチ コーポレーション | 分流レスガス投与 |
-
1972
- 1972-10-20 JP JP10491072A patent/JPS4964484A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023523921A (ja) * | 2020-04-24 | 2023-06-08 | ラム リサーチ コーポレーション | 分流レスガス投与 |