JPS4963966A - - Google Patents

Info

Publication number
JPS4963966A
JPS4963966A JP48079987A JP7998773A JPS4963966A JP S4963966 A JPS4963966 A JP S4963966A JP 48079987 A JP48079987 A JP 48079987A JP 7998773 A JP7998773 A JP 7998773A JP S4963966 A JPS4963966 A JP S4963966A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48079987A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4963966A publication Critical patent/JPS4963966A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/467—Adding a circuit layer by thin film methods
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Weting (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
JP48079987A 1972-07-17 1973-07-17 Pending JPS4963966A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US27251972A 1972-07-17 1972-07-17

Publications (1)

Publication Number Publication Date
JPS4963966A true JPS4963966A (ja) 1974-06-20

Family

ID=23040144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48079987A Pending JPS4963966A (ja) 1972-07-17 1973-07-17

Country Status (4)

Country Link
JP (1) JPS4963966A (ja)
FR (1) FR2193256B1 (ja)
GB (1) GB1404524A (ja)
NL (1) NL7309531A (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2937993A1 (de) * 1979-09-20 1981-04-02 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen von integrierten mos-halbleiterschaltungen nach der silizium-gate-technologie
US7790624B2 (en) 2008-07-16 2010-09-07 Global Foundries Inc. Methods for removing a metal-comprising material from a semiconductor substrate

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3507766A (en) * 1968-01-19 1970-04-21 Texas Instruments Inc Method of forming a heterogeneous composite insulating layer of silicon dioxide in multilevel integrated circuits

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3507766A (en) * 1968-01-19 1970-04-21 Texas Instruments Inc Method of forming a heterogeneous composite insulating layer of silicon dioxide in multilevel integrated circuits

Also Published As

Publication number Publication date
DE2334213B2 (de) 1974-08-29
FR2193256A1 (ja) 1974-02-15
NL7309531A (ja) 1974-01-21
FR2193256B1 (ja) 1978-02-17
DE2334213A1 (de) 1974-01-31
GB1404524A (en) 1975-09-03

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