JPS4963667A - - Google Patents
Info
- Publication number
- JPS4963667A JPS4963667A JP10500672A JP10500672A JPS4963667A JP S4963667 A JPS4963667 A JP S4963667A JP 10500672 A JP10500672 A JP 10500672A JP 10500672 A JP10500672 A JP 10500672A JP S4963667 A JPS4963667 A JP S4963667A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10500672A JPS5215073B2 (de) | 1972-10-20 | 1972-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10500672A JPS5215073B2 (de) | 1972-10-20 | 1972-10-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4963667A true JPS4963667A (de) | 1974-06-20 |
| JPS5215073B2 JPS5215073B2 (de) | 1977-04-26 |
Family
ID=14395973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10500672A Expired JPS5215073B2 (de) | 1972-10-20 | 1972-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5215073B2 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5828012B2 (ja) * | 1977-05-31 | 1983-06-13 | 旭精機工業株式会社 | オツシレ−テイングフイ−ド装置 |
-
1972
- 1972-10-20 JP JP10500672A patent/JPS5215073B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5215073B2 (de) | 1977-04-26 |