JPS4963458A - - Google Patents
Info
- Publication number
- JPS4963458A JPS4963458A JP10409972A JP10409972A JPS4963458A JP S4963458 A JPS4963458 A JP S4963458A JP 10409972 A JP10409972 A JP 10409972A JP 10409972 A JP10409972 A JP 10409972A JP S4963458 A JPS4963458 A JP S4963458A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10409972A JPS4963458A (en) | 1972-10-16 | 1972-10-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10409972A JPS4963458A (en) | 1972-10-16 | 1972-10-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4963458A true JPS4963458A (en) | 1974-06-19 |
Family
ID=14371656
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10409972A Pending JPS4963458A (en) | 1972-10-16 | 1972-10-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4963458A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5698069A (en) * | 1995-09-10 | 1997-12-16 | Nikon Precision Inc. | Technique for detecting particles on a wafer support surface |
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1972
- 1972-10-16 JP JP10409972A patent/JPS4963458A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5698069A (en) * | 1995-09-10 | 1997-12-16 | Nikon Precision Inc. | Technique for detecting particles on a wafer support surface |