JPS4962513A - - Google Patents
Info
- Publication number
- JPS4962513A JPS4962513A JP10494972A JP10494972A JPS4962513A JP S4962513 A JPS4962513 A JP S4962513A JP 10494972 A JP10494972 A JP 10494972A JP 10494972 A JP10494972 A JP 10494972A JP S4962513 A JPS4962513 A JP S4962513A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10494972A JPS571893B2 (en, 2012) | 1972-10-20 | 1972-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10494972A JPS571893B2 (en, 2012) | 1972-10-20 | 1972-10-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4962513A true JPS4962513A (en, 2012) | 1974-06-18 |
| JPS571893B2 JPS571893B2 (en, 2012) | 1982-01-13 |
Family
ID=14394335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10494972A Expired JPS571893B2 (en, 2012) | 1972-10-20 | 1972-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS571893B2 (en, 2012) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51138168A (en) * | 1975-05-26 | 1976-11-29 | Hitachi Ltd | Production method of semiconductor element |
| JP2021174926A (ja) * | 2020-04-28 | 2021-11-01 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置、及び基板処理方法 |
-
1972
- 1972-10-20 JP JP10494972A patent/JPS571893B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51138168A (en) * | 1975-05-26 | 1976-11-29 | Hitachi Ltd | Production method of semiconductor element |
| JP2021174926A (ja) * | 2020-04-28 | 2021-11-01 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置、及び基板処理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS571893B2 (en, 2012) | 1982-01-13 |