JPS4962383A - - Google Patents
Info
- Publication number
- JPS4962383A JPS4962383A JP10396372A JP10396372A JPS4962383A JP S4962383 A JPS4962383 A JP S4962383A JP 10396372 A JP10396372 A JP 10396372A JP 10396372 A JP10396372 A JP 10396372A JP S4962383 A JPS4962383 A JP S4962383A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10396372A JPS5213512B2 (xx) | 1972-10-19 | 1972-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10396372A JPS5213512B2 (xx) | 1972-10-19 | 1972-10-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4962383A true JPS4962383A (xx) | 1974-06-17 |
| JPS5213512B2 JPS5213512B2 (xx) | 1977-04-14 |
Family
ID=14368017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10396372A Expired JPS5213512B2 (xx) | 1972-10-19 | 1972-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5213512B2 (xx) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0538310Y2 (xx) * | 1986-07-21 | 1993-09-28 |
-
1972
- 1972-10-19 JP JP10396372A patent/JPS5213512B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5213512B2 (xx) | 1977-04-14 |