JPS4962382A - - Google Patents

Info

Publication number
JPS4962382A
JPS4962382A JP10364472A JP10364472A JPS4962382A JP S4962382 A JPS4962382 A JP S4962382A JP 10364472 A JP10364472 A JP 10364472A JP 10364472 A JP10364472 A JP 10364472A JP S4962382 A JPS4962382 A JP S4962382A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10364472A
Other languages
Japanese (ja)
Other versions
JPS5213511B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10364472A priority Critical patent/JPS5213511B2/ja
Publication of JPS4962382A publication Critical patent/JPS4962382A/ja
Publication of JPS5213511B2 publication Critical patent/JPS5213511B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10364472A 1972-10-18 1972-10-18 Expired JPS5213511B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10364472A JPS5213511B2 (cs) 1972-10-18 1972-10-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10364472A JPS5213511B2 (cs) 1972-10-18 1972-10-18

Publications (2)

Publication Number Publication Date
JPS4962382A true JPS4962382A (cs) 1974-06-17
JPS5213511B2 JPS5213511B2 (cs) 1977-04-14

Family

ID=14359466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10364472A Expired JPS5213511B2 (cs) 1972-10-18 1972-10-18

Country Status (1)

Country Link
JP (1) JPS5213511B2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5185292A (en) * 1975-03-15 1976-07-26 Matsushita Electric Works Ltd Matsusaajikino okurisochi
JPS5339983A (en) * 1976-09-25 1978-04-12 Oki Electric Ind Co Ltd Manufacture of thin film

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121010U (cs) * 1979-02-21 1980-08-27
JPS56107331U (cs) * 1980-01-21 1981-08-20

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5185292A (en) * 1975-03-15 1976-07-26 Matsushita Electric Works Ltd Matsusaajikino okurisochi
JPS5339983A (en) * 1976-09-25 1978-04-12 Oki Electric Ind Co Ltd Manufacture of thin film

Also Published As

Publication number Publication date
JPS5213511B2 (cs) 1977-04-14

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