JPS4962382A - - Google Patents

Info

Publication number
JPS4962382A
JPS4962382A JP10364472A JP10364472A JPS4962382A JP S4962382 A JPS4962382 A JP S4962382A JP 10364472 A JP10364472 A JP 10364472A JP 10364472 A JP10364472 A JP 10364472A JP S4962382 A JPS4962382 A JP S4962382A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10364472A
Other languages
Japanese (ja)
Other versions
JPS5213511B2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10364472A priority Critical patent/JPS5213511B2/ja
Publication of JPS4962382A publication Critical patent/JPS4962382A/ja
Publication of JPS5213511B2 publication Critical patent/JPS5213511B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10364472A 1972-10-18 1972-10-18 Expired JPS5213511B2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10364472A JPS5213511B2 (cg-RX-API-DMAC7.html) 1972-10-18 1972-10-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10364472A JPS5213511B2 (cg-RX-API-DMAC7.html) 1972-10-18 1972-10-18

Publications (2)

Publication Number Publication Date
JPS4962382A true JPS4962382A (cg-RX-API-DMAC7.html) 1974-06-17
JPS5213511B2 JPS5213511B2 (cg-RX-API-DMAC7.html) 1977-04-14

Family

ID=14359466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10364472A Expired JPS5213511B2 (cg-RX-API-DMAC7.html) 1972-10-18 1972-10-18

Country Status (1)

Country Link
JP (1) JPS5213511B2 (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5185292A (en) * 1975-03-15 1976-07-26 Matsushita Electric Works Ltd Matsusaajikino okurisochi
JPS5339983A (en) * 1976-09-25 1978-04-12 Oki Electric Ind Co Ltd Manufacture of thin film

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121010U (cg-RX-API-DMAC7.html) * 1979-02-21 1980-08-27
JPS56107331U (cg-RX-API-DMAC7.html) * 1980-01-21 1981-08-20

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5185292A (en) * 1975-03-15 1976-07-26 Matsushita Electric Works Ltd Matsusaajikino okurisochi
JPS5339983A (en) * 1976-09-25 1978-04-12 Oki Electric Ind Co Ltd Manufacture of thin film

Also Published As

Publication number Publication date
JPS5213511B2 (cg-RX-API-DMAC7.html) 1977-04-14

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