JPS4962153A - - Google Patents

Info

Publication number
JPS4962153A
JPS4962153A JP48050931A JP5093173A JPS4962153A JP S4962153 A JPS4962153 A JP S4962153A JP 48050931 A JP48050931 A JP 48050931A JP 5093173 A JP5093173 A JP 5093173A JP S4962153 A JPS4962153 A JP S4962153A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48050931A
Other languages
Japanese (ja)
Other versions
JPS5536922B2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4962153A publication Critical patent/JPS4962153A/ja
Publication of JPS5536922B2 publication Critical patent/JPS5536922B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP5093173A 1972-05-08 1973-05-08 Expired JPS5536922B2 (OSRAM)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US25090372A 1972-05-08 1972-05-08

Publications (2)

Publication Number Publication Date
JPS4962153A true JPS4962153A (OSRAM) 1974-06-17
JPS5536922B2 JPS5536922B2 (OSRAM) 1980-09-25

Family

ID=22949632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5093173A Expired JPS5536922B2 (OSRAM) 1972-05-08 1973-05-08

Country Status (5)

Country Link
US (1) US3790284A (OSRAM)
JP (1) JPS5536922B2 (OSRAM)
CA (1) CA984138A (OSRAM)
FR (1) FR2183908B1 (OSRAM)
GB (1) GB1409339A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5892808A (ja) * 1981-11-27 1983-06-02 Sumitomo Metal Ind Ltd ロ−ル形状測定方法及び装置

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4043671A (en) * 1976-07-13 1977-08-23 The United States Of America As Represented By The United States Energy Research And Development Administration Laser system preset unit
US4329059A (en) * 1980-03-03 1982-05-11 The Boeing Company Multiple channel interferometer
US4261107A (en) * 1980-03-06 1981-04-14 Caterpillar Tractor Co. Coordinate locating device
HU182123B (en) * 1980-04-17 1983-12-28 Budapesti Mueszaki Egyetem Method and apparatus for mesuring the physical characteristics of materials in motion using coherent light source with heterodyn sensing of the reflected or scattered light from the materials
US4401886A (en) * 1981-03-23 1983-08-30 The Boeing Company Electromagnetic beam acquisition and tracking system
JPS62223604A (ja) * 1986-03-26 1987-10-01 Agency Of Ind Science & Technol ２重光路干渉測長装置
US4717250A (en) * 1986-03-28 1988-01-05 Zygo Corporation Angle measuring interferometer
US4746216A (en) * 1986-03-28 1988-05-24 Zygo Corporation Angle measuring interferometer
GB8720014D0 (en) * 1987-08-25 1987-09-30 Renishaw Plc Straightness interferometer
US4787747A (en) * 1987-11-13 1988-11-29 Zygo Corporation Straightness of travel interferometer
US4884889A (en) * 1987-11-19 1989-12-05 Brown & Sharpe Manufacturing Company Calibration system for coordinate measuring machine
US4939678A (en) * 1987-11-19 1990-07-03 Brown & Sharpe Manufacturing Company Method for calibration of coordinate measuring machine
GB8730169D0 (en) * 1987-12-24 1988-02-03 Renishaw Plc Optical apparatus for use with interferometric measuring devices
GB8806061D0 (en) * 1988-03-15 1988-04-13 Nde Instr Ltd Measurement of process variables
US5191391A (en) * 1991-01-29 1993-03-02 Excel Precision High resolution plane mirror interferometer
GB9202691D0 (en) * 1992-02-08 1992-03-25 Renishaw Transducer Syst Straightness interferometer system
US5263776A (en) * 1992-09-25 1993-11-23 International Business Machines Corporation Multi-wavelength optical thermometry
US5446546A (en) * 1993-07-02 1995-08-29 The Boeing Company Laser interferometric single piece force transducer
US5404222A (en) * 1994-01-14 1995-04-04 Sparta, Inc. Interferametric measuring system with air turbulence compensation
DE4421302C1 (de) * 1994-06-17 1995-12-07 Leitz Mestechnik Gmbh Verfahren zur Eliminierung des Rollwinkels einer Meßachse einer Koordinatenmeßmaschine sowie Vorrichtung zur Durchführung des Verfahrens
JPH085314A (ja) * 1994-06-20 1996-01-12 Canon Inc 変位測定方法及び変位測定装置
US5659392A (en) * 1995-03-22 1997-08-19 Eastman Kodak Company Associated dual interferometric measurement apparatus for determining a physical property of an object
US5596409A (en) * 1995-03-22 1997-01-21 Eastman Kodak Company Associated dual interferometric measurement method for determining a physical property of an object
WO1998007012A1 (en) * 1996-08-16 1998-02-19 Automated Precision, Inc. Five-axis/six-axis laser measuring system
US5757491A (en) * 1996-08-19 1998-05-26 The Hong Kong University Of Science & Technology Laser interferometer system for straightness measurements
US5991033A (en) * 1996-09-20 1999-11-23 Sparta, Inc. Interferometer with air turbulence compensation
US6261152B1 (en) 1998-07-16 2001-07-17 Nikon Research Corporation Of America Heterdoyne Thickness Monitoring System
FR2787184B1 (fr) * 1998-12-15 2001-01-19 Cogema Procede de controle de perpendicularite d'une piece cylindrique, telle qu'une pastille de combustible nucleaire
US6519042B1 (en) 2000-08-25 2003-02-11 Industrial Technology Research Institute Interferometer system for displacement and straightness measurements
US8693006B2 (en) * 2005-06-28 2014-04-08 Nikon Corporation Reflector, optical element, interferometer system, stage device, exposure apparatus, and device fabricating method
CN101650166B (zh) * 2008-08-15 2012-04-11 上海理工大学 用于测量微滚转角的激光干涉系统
DE102009015507B4 (de) * 2009-04-02 2010-12-23 Bundesrepublik Deutschland, vertr.d.d. Bundesministerium für Wirtschaft und Technologie, d.vertr.d.d. Präsidenten der Physikalisch-Technischen Bundesanstalt Verfahren zum Messen eines Rollwinkels und Rollwinkelmessvorrichtung
CN105674917A (zh) * 2016-03-10 2016-06-15 中国科学院高能物理研究所 组合式反射镜光栅外差干涉的滚转角测量装置及方法
CN107024284B (zh) * 2017-03-29 2019-03-01 西安工业大学 一种实时补偿的大口径准直波前误差检测装置及方法
US10323934B1 (en) 2018-04-02 2019-06-18 Northrop Grumman Systems Corporation Optical protractor to measure roll angle on a static surface and rotating surface
CN108917612B (zh) * 2018-05-18 2024-05-17 山西新日升昌电子科技有限公司 跟踪式位移传感器及其测量方法
US10670391B2 (en) 2018-10-26 2020-06-02 Northrop Grumman Systems Corporation Confocal optical protractor
CN109631805B (zh) * 2018-12-21 2020-08-04 浙江理工大学 渥拉斯顿棱镜移动式激光干涉直线度及位移同时测量装置
CN109781034B (zh) * 2019-01-22 2020-11-10 上海理工大学 微小滚转角与直线度同步高精度测量干涉仪以及测量方法
JP7477755B2 (ja) 2020-03-31 2024-05-02 株式会社東京精密 真直度測定装置
CN116222437A (zh) * 2020-12-25 2023-06-06 深圳市中图仪器股份有限公司 具有平行光束偏光元件的直线度干涉测量装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1283128A (fr) * 1961-03-09 1962-01-27 Bausch & Lomb Interféromètre utilisant un réseau de diffraction
US3523735A (en) * 1966-10-07 1970-08-11 Gen Dynamics Corp Interferometer system for distance measurement
US3458259A (en) * 1966-11-07 1969-07-29 Hewlett Packard Co Interferometric system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5892808A (ja) * 1981-11-27 1983-06-02 Sumitomo Metal Ind Ltd ロ−ル形状測定方法及び装置

Also Published As

Publication number Publication date
DE2322804B2 (de) 1976-03-04
FR2183908A1 (OSRAM) 1973-12-21
GB1409339A (en) 1975-10-08
JPS5536922B2 (OSRAM) 1980-09-25
FR2183908B1 (OSRAM) 1976-04-09
DE2322804A1 (de) 1973-11-22
CA984138A (en) 1976-02-24
AU5481073A (en) 1974-10-31
US3790284A (en) 1974-02-05

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