JPS4961032A - - Google Patents
Info
- Publication number
- JPS4961032A JPS4961032A JP10322072A JP10322072A JPS4961032A JP S4961032 A JPS4961032 A JP S4961032A JP 10322072 A JP10322072 A JP 10322072A JP 10322072 A JP10322072 A JP 10322072A JP S4961032 A JPS4961032 A JP S4961032A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10322072A JPS5343894B2 (en) | 1972-10-17 | 1972-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10322072A JPS5343894B2 (en) | 1972-10-17 | 1972-10-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4961032A true JPS4961032A (en) | 1974-06-13 |
| JPS5343894B2 JPS5343894B2 (en) | 1978-11-24 |
Family
ID=14348399
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10322072A Expired JPS5343894B2 (en) | 1972-10-17 | 1972-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5343894B2 (en) |
-
1972
- 1972-10-17 JP JP10322072A patent/JPS5343894B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5343894B2 (en) | 1978-11-24 |