JPS4960868A - - Google Patents
Info
- Publication number
- JPS4960868A JPS4960868A JP10428472A JP10428472A JPS4960868A JP S4960868 A JPS4960868 A JP S4960868A JP 10428472 A JP10428472 A JP 10428472A JP 10428472 A JP10428472 A JP 10428472A JP S4960868 A JPS4960868 A JP S4960868A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10428472A JPS4960868A (it) | 1972-10-16 | 1972-10-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10428472A JPS4960868A (it) | 1972-10-16 | 1972-10-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4960868A true JPS4960868A (it) | 1974-06-13 |
Family
ID=14376614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10428472A Pending JPS4960868A (it) | 1972-10-16 | 1972-10-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4960868A (it) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6269513A (ja) * | 1985-09-21 | 1987-03-30 | Mitsubishi Electric Corp | 半導体基板の製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3328213A (en) * | 1963-11-26 | 1967-06-27 | Int Rectifier Corp | Method for growing silicon film |
-
1972
- 1972-10-16 JP JP10428472A patent/JPS4960868A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3328213A (en) * | 1963-11-26 | 1967-06-27 | Int Rectifier Corp | Method for growing silicon film |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6269513A (ja) * | 1985-09-21 | 1987-03-30 | Mitsubishi Electric Corp | 半導体基板の製造方法 |