JPS4960484A - - Google Patents

Info

Publication number
JPS4960484A
JPS4960484A JP47102281A JP10228172A JPS4960484A JP S4960484 A JPS4960484 A JP S4960484A JP 47102281 A JP47102281 A JP 47102281A JP 10228172 A JP10228172 A JP 10228172A JP S4960484 A JPS4960484 A JP S4960484A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP47102281A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47102281A priority Critical patent/JPS4960484A/ja
Priority to GB4686073A priority patent/GB1424917A/en
Priority to US05/405,733 priority patent/US3935328A/en
Priority to DE19732351395 priority patent/DE2351395C3/de
Publication of JPS4960484A publication Critical patent/JPS4960484A/ja
Pending legal-status Critical Current

Links

Classifications

    • H10P14/6312—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H10P14/61—
    • H10P14/6319—
    • H10P95/00—
    • H10W10/00—
    • H10W10/01—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/065—Gp III-V generic compounds-processing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/085—Isolated-integrated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/117—Oxidation, selective
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/118—Oxide films

Landscapes

  • Formation Of Insulating Films (AREA)
  • Element Separation (AREA)
JP47102281A 1972-10-12 1972-10-12 Pending JPS4960484A (cg-RX-API-DMAC10.html)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP47102281A JPS4960484A (cg-RX-API-DMAC10.html) 1972-10-12 1972-10-12
GB4686073A GB1424917A (en) 1972-10-12 1973-10-08 Method for providing dielectric isolation in an epitaxial layer and for providing isolation and protection for pn- junction of a compound semiconductor using plasma oxidation
US05/405,733 US3935328A (en) 1972-10-12 1973-10-11 Method for providing dielectric isolation in an epitaxial layer of a compound semiconductor using the plasma oxidation
DE19732351395 DE2351395C3 (de) 1972-10-12 1973-10-12 Verfahren zur Ausbildung einer dielektrischen Isolationsschicht in einer epitaxialen Schicht eines Verbindungshalbleiters oder zur Ausbildung einer Isolations- und Schutzschicht für den pnÜbergang eines Verbindungshalbleiters

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47102281A JPS4960484A (cg-RX-API-DMAC10.html) 1972-10-12 1972-10-12

Publications (1)

Publication Number Publication Date
JPS4960484A true JPS4960484A (cg-RX-API-DMAC10.html) 1974-06-12

Family

ID=14323209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47102281A Pending JPS4960484A (cg-RX-API-DMAC10.html) 1972-10-12 1972-10-12

Country Status (3)

Country Link
US (1) US3935328A (cg-RX-API-DMAC10.html)
JP (1) JPS4960484A (cg-RX-API-DMAC10.html)
GB (1) GB1424917A (cg-RX-API-DMAC10.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3971684A (en) * 1973-12-03 1976-07-27 Hewlett-Packard Company Etching thin film circuits and semiconductor chips
US4232057A (en) * 1979-03-01 1980-11-04 International Business Machines Corporation Semiconductor plasma oxidation
US4521441A (en) * 1983-12-19 1985-06-04 Motorola, Inc. Plasma enhanced diffusion process
US5958519A (en) * 1997-09-15 1999-09-28 National Science Council Method for forming oxide film on III-V substrate

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3442701A (en) * 1965-05-19 1969-05-06 Bell Telephone Labor Inc Method of fabricating semiconductor contacts
US3434868A (en) * 1965-10-14 1969-03-25 Gen Electric Silicon dioxide coatings utilizing a plasma
US3649386A (en) * 1968-04-23 1972-03-14 Bell Telephone Labor Inc Method of fabricating semiconductor devices

Also Published As

Publication number Publication date
US3935328A (en) 1976-01-27
DE2351395A1 (de) 1974-05-02
GB1424917A (en) 1976-02-11
DE2351395B2 (de) 1977-05-05

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