JPS4960279A - - Google Patents
Info
- Publication number
- JPS4960279A JPS4960279A JP10029272A JP10029272A JPS4960279A JP S4960279 A JPS4960279 A JP S4960279A JP 10029272 A JP10029272 A JP 10029272A JP 10029272 A JP10029272 A JP 10029272A JP S4960279 A JPS4960279 A JP S4960279A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47100292A JPS5240879B2 (https=) | 1972-10-07 | 1972-10-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47100292A JPS5240879B2 (https=) | 1972-10-07 | 1972-10-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4960279A true JPS4960279A (https=) | 1974-06-11 |
| JPS5240879B2 JPS5240879B2 (https=) | 1977-10-14 |
Family
ID=14270087
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47100292A Expired JPS5240879B2 (https=) | 1972-10-07 | 1972-10-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5240879B2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63127147A (ja) * | 1986-11-17 | 1988-05-31 | Hitachi Electronics Eng Co Ltd | 面板欠陥検出装置の検出信号電圧制御方式 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4326397Y1 (https=) * | 1964-09-19 | 1968-11-02 | ||
| JPS451934Y1 (https=) * | 1966-05-25 | 1970-01-27 |
-
1972
- 1972-10-07 JP JP47100292A patent/JPS5240879B2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4326397Y1 (https=) * | 1964-09-19 | 1968-11-02 | ||
| JPS451934Y1 (https=) * | 1966-05-25 | 1970-01-27 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63127147A (ja) * | 1986-11-17 | 1988-05-31 | Hitachi Electronics Eng Co Ltd | 面板欠陥検出装置の検出信号電圧制御方式 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5240879B2 (https=) | 1977-10-14 |