JPS4960279A - - Google Patents

Info

Publication number
JPS4960279A
JPS4960279A JP10029272A JP10029272A JPS4960279A JP S4960279 A JPS4960279 A JP S4960279A JP 10029272 A JP10029272 A JP 10029272A JP 10029272 A JP10029272 A JP 10029272A JP S4960279 A JPS4960279 A JP S4960279A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10029272A
Other languages
Japanese (ja)
Other versions
JPS5240879B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47100292A priority Critical patent/JPS5240879B2/ja
Publication of JPS4960279A publication Critical patent/JPS4960279A/ja
Publication of JPS5240879B2 publication Critical patent/JPS5240879B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP47100292A 1972-10-07 1972-10-07 Expired JPS5240879B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47100292A JPS5240879B2 (enrdf_load_stackoverflow) 1972-10-07 1972-10-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47100292A JPS5240879B2 (enrdf_load_stackoverflow) 1972-10-07 1972-10-07

Publications (2)

Publication Number Publication Date
JPS4960279A true JPS4960279A (enrdf_load_stackoverflow) 1974-06-11
JPS5240879B2 JPS5240879B2 (enrdf_load_stackoverflow) 1977-10-14

Family

ID=14270087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47100292A Expired JPS5240879B2 (enrdf_load_stackoverflow) 1972-10-07 1972-10-07

Country Status (1)

Country Link
JP (1) JPS5240879B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63127147A (ja) * 1986-11-17 1988-05-31 Hitachi Electronics Eng Co Ltd 面板欠陥検出装置の検出信号電圧制御方式

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4326397Y1 (enrdf_load_stackoverflow) * 1964-09-19 1968-11-02
JPS451934Y1 (enrdf_load_stackoverflow) * 1966-05-25 1970-01-27

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4326397Y1 (enrdf_load_stackoverflow) * 1964-09-19 1968-11-02
JPS451934Y1 (enrdf_load_stackoverflow) * 1966-05-25 1970-01-27

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63127147A (ja) * 1986-11-17 1988-05-31 Hitachi Electronics Eng Co Ltd 面板欠陥検出装置の検出信号電圧制御方式

Also Published As

Publication number Publication date
JPS5240879B2 (enrdf_load_stackoverflow) 1977-10-14

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