JPS4960279A - - Google Patents

Info

Publication number
JPS4960279A
JPS4960279A JP10029272A JP10029272A JPS4960279A JP S4960279 A JPS4960279 A JP S4960279A JP 10029272 A JP10029272 A JP 10029272A JP 10029272 A JP10029272 A JP 10029272A JP S4960279 A JPS4960279 A JP S4960279A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10029272A
Other languages
Japanese (ja)
Other versions
JPS5240879B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47100292A priority Critical patent/JPS5240879B2/ja
Publication of JPS4960279A publication Critical patent/JPS4960279A/ja
Publication of JPS5240879B2 publication Critical patent/JPS5240879B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP47100292A 1972-10-07 1972-10-07 Expired JPS5240879B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47100292A JPS5240879B2 (cs) 1972-10-07 1972-10-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47100292A JPS5240879B2 (cs) 1972-10-07 1972-10-07

Publications (2)

Publication Number Publication Date
JPS4960279A true JPS4960279A (cs) 1974-06-11
JPS5240879B2 JPS5240879B2 (cs) 1977-10-14

Family

ID=14270087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47100292A Expired JPS5240879B2 (cs) 1972-10-07 1972-10-07

Country Status (1)

Country Link
JP (1) JPS5240879B2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63127147A (ja) * 1986-11-17 1988-05-31 Hitachi Electronics Eng Co Ltd 面板欠陥検出装置の検出信号電圧制御方式

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4326397Y1 (cs) * 1964-09-19 1968-11-02
JPS451934Y1 (cs) * 1966-05-25 1970-01-27

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4326397Y1 (cs) * 1964-09-19 1968-11-02
JPS451934Y1 (cs) * 1966-05-25 1970-01-27

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63127147A (ja) * 1986-11-17 1988-05-31 Hitachi Electronics Eng Co Ltd 面板欠陥検出装置の検出信号電圧制御方式

Also Published As

Publication number Publication date
JPS5240879B2 (cs) 1977-10-14

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