JPS4959573A - - Google Patents

Info

Publication number
JPS4959573A
JPS4959573A JP9945072A JP9945072A JPS4959573A JP S4959573 A JPS4959573 A JP S4959573A JP 9945072 A JP9945072 A JP 9945072A JP 9945072 A JP9945072 A JP 9945072A JP S4959573 A JPS4959573 A JP S4959573A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9945072A
Other languages
Japanese (ja)
Other versions
JPS5139832B2 (da
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9945072A priority Critical patent/JPS5139832B2/ja
Publication of JPS4959573A publication Critical patent/JPS4959573A/ja
Publication of JPS5139832B2 publication Critical patent/JPS5139832B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP9945072A 1972-10-05 1972-10-05 Expired JPS5139832B2 (da)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9945072A JPS5139832B2 (da) 1972-10-05 1972-10-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9945072A JPS5139832B2 (da) 1972-10-05 1972-10-05

Publications (2)

Publication Number Publication Date
JPS4959573A true JPS4959573A (da) 1974-06-10
JPS5139832B2 JPS5139832B2 (da) 1976-10-29

Family

ID=14247674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9945072A Expired JPS5139832B2 (da) 1972-10-05 1972-10-05

Country Status (1)

Country Link
JP (1) JPS5139832B2 (da)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60167276U (ja) * 1984-04-12 1985-11-06 三菱重工業株式会社 サ−ボバルブ

Also Published As

Publication number Publication date
JPS5139832B2 (da) 1976-10-29

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