JPS4958616A - - Google Patents
Info
- Publication number
- JPS4958616A JPS4958616A JP10077572A JP10077572A JPS4958616A JP S4958616 A JPS4958616 A JP S4958616A JP 10077572 A JP10077572 A JP 10077572A JP 10077572 A JP10077572 A JP 10077572A JP S4958616 A JPS4958616 A JP S4958616A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Revetment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10077572A JPS4958616A (fr) | 1972-10-06 | 1972-10-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10077572A JPS4958616A (fr) | 1972-10-06 | 1972-10-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4958616A true JPS4958616A (fr) | 1974-06-06 |
Family
ID=14282841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10077572A Pending JPS4958616A (fr) | 1972-10-06 | 1972-10-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4958616A (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10579772B2 (en) | 2014-06-10 | 2020-03-03 | Asml Netherlands B.V. | Computational wafer inspection |
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1972
- 1972-10-06 JP JP10077572A patent/JPS4958616A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10579772B2 (en) | 2014-06-10 | 2020-03-03 | Asml Netherlands B.V. | Computational wafer inspection |