JPS4957551U - - Google Patents

Info

Publication number
JPS4957551U
JPS4957551U JP10521472U JP10521472U JPS4957551U JP S4957551 U JPS4957551 U JP S4957551U JP 10521472 U JP10521472 U JP 10521472U JP 10521472 U JP10521472 U JP 10521472U JP S4957551 U JPS4957551 U JP S4957551U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10521472U
Other languages
Japanese (ja)
Other versions
JPS5127245Y2 (no
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10521472U priority Critical patent/JPS5127245Y2/ja
Publication of JPS4957551U publication Critical patent/JPS4957551U/ja
Application granted granted Critical
Publication of JPS5127245Y2 publication Critical patent/JPS5127245Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10521472U 1972-09-01 1972-09-01 Expired JPS5127245Y2 (no)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10521472U JPS5127245Y2 (no) 1972-09-01 1972-09-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10521472U JPS5127245Y2 (no) 1972-09-01 1972-09-01

Publications (2)

Publication Number Publication Date
JPS4957551U true JPS4957551U (no) 1974-05-21
JPS5127245Y2 JPS5127245Y2 (no) 1976-07-10

Family

ID=28318981

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10521472U Expired JPS5127245Y2 (no) 1972-09-01 1972-09-01

Country Status (1)

Country Link
JP (1) JPS5127245Y2 (no)

Also Published As

Publication number Publication date
JPS5127245Y2 (no) 1976-07-10

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