JPS4954862A - - Google Patents

Info

Publication number
JPS4954862A
JPS4954862A JP9746172A JP9746172A JPS4954862A JP S4954862 A JPS4954862 A JP S4954862A JP 9746172 A JP9746172 A JP 9746172A JP 9746172 A JP9746172 A JP 9746172A JP S4954862 A JPS4954862 A JP S4954862A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9746172A
Other languages
Japanese (ja)
Other versions
JPS5543254B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9746172A priority Critical patent/JPS5543254B2/ja
Publication of JPS4954862A publication Critical patent/JPS4954862A/ja
Publication of JPS5543254B2 publication Critical patent/JPS5543254B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP9746172A 1972-09-28 1972-09-28 Expired JPS5543254B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9746172A JPS5543254B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-09-28 1972-09-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9746172A JPS5543254B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-09-28 1972-09-28

Publications (2)

Publication Number Publication Date
JPS4954862A true JPS4954862A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-05-28
JPS5543254B2 JPS5543254B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-11-05

Family

ID=14192930

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9746172A Expired JPS5543254B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-09-28 1972-09-28

Country Status (1)

Country Link
JP (1) JPS5543254B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS5543254B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-11-05

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