JPS4954277A - - Google Patents
Info
- Publication number
- JPS4954277A JPS4954277A JP9620272A JP9620272A JPS4954277A JP S4954277 A JPS4954277 A JP S4954277A JP 9620272 A JP9620272 A JP 9620272A JP 9620272 A JP9620272 A JP 9620272A JP S4954277 A JPS4954277 A JP S4954277A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Silicon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9620272A JPS5215074B2 (ja�@�@) | 1972-09-27 | 1972-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9620272A JPS5215074B2 (ja�@�@) | 1972-09-27 | 1972-09-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4954277A true JPS4954277A (ja�@�@) | 1974-05-27 |
| JPS5215074B2 JPS5215074B2 (ja�@�@) | 1977-04-26 |
Family
ID=14158678
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9620272A Expired JPS5215074B2 (ja�@�@) | 1972-09-27 | 1972-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5215074B2 (ja�@�@) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57116338U (ja�@�@) * | 1981-01-07 | 1982-07-19 | ||
| JPS57181441U (ja�@�@) * | 1981-05-14 | 1982-11-17 |
-
1972
- 1972-09-27 JP JP9620272A patent/JPS5215074B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5215074B2 (ja�@�@) | 1977-04-26 |