JPS4952977A - - Google Patents

Info

Publication number
JPS4952977A
JPS4952977A JP9515972A JP9515972A JPS4952977A JP S4952977 A JPS4952977 A JP S4952977A JP 9515972 A JP9515972 A JP 9515972A JP 9515972 A JP9515972 A JP 9515972A JP S4952977 A JPS4952977 A JP S4952977A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9515972A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9515972A priority Critical patent/JPS4952977A/ja
Publication of JPS4952977A publication Critical patent/JPS4952977A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP9515972A 1972-09-25 1972-09-25 Pending JPS4952977A (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9515972A JPS4952977A (xx) 1972-09-25 1972-09-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9515972A JPS4952977A (xx) 1972-09-25 1972-09-25

Publications (1)

Publication Number Publication Date
JPS4952977A true JPS4952977A (xx) 1974-05-23

Family

ID=14129991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9515972A Pending JPS4952977A (xx) 1972-09-25 1972-09-25

Country Status (1)

Country Link
JP (1) JPS4952977A (xx)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5179575A (xx) * 1975-01-06 1976-07-10 Hitachi Ltd
JPS53108284A (en) * 1977-03-03 1978-09-20 Hattori Isao Photomask original plate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5179575A (xx) * 1975-01-06 1976-07-10 Hitachi Ltd
JPS53108284A (en) * 1977-03-03 1978-09-20 Hattori Isao Photomask original plate

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