JPS495266A - - Google Patents

Info

Publication number
JPS495266A
JPS495266A JP4348272A JP4348272A JPS495266A JP S495266 A JPS495266 A JP S495266A JP 4348272 A JP4348272 A JP 4348272A JP 4348272 A JP4348272 A JP 4348272A JP S495266 A JPS495266 A JP S495266A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4348272A
Other languages
Japanese (ja)
Other versions
JPS5132501B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4348272A priority Critical patent/JPS5132501B2/ja
Publication of JPS495266A publication Critical patent/JPS495266A/ja
Publication of JPS5132501B2 publication Critical patent/JPS5132501B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP4348272A 1972-05-01 1972-05-01 Expired JPS5132501B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4348272A JPS5132501B2 (enrdf_load_stackoverflow) 1972-05-01 1972-05-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4348272A JPS5132501B2 (enrdf_load_stackoverflow) 1972-05-01 1972-05-01

Publications (2)

Publication Number Publication Date
JPS495266A true JPS495266A (enrdf_load_stackoverflow) 1974-01-17
JPS5132501B2 JPS5132501B2 (enrdf_load_stackoverflow) 1976-09-13

Family

ID=12664930

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4348272A Expired JPS5132501B2 (enrdf_load_stackoverflow) 1972-05-01 1972-05-01

Country Status (1)

Country Link
JP (1) JPS5132501B2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5773176A (en) * 1980-08-21 1982-05-07 Nat Res Dev Coating adhesion
JPH01307443A (ja) * 1988-06-03 1989-12-12 Tokyo Electron Ltd プラズマ処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5773176A (en) * 1980-08-21 1982-05-07 Nat Res Dev Coating adhesion
JPH01307443A (ja) * 1988-06-03 1989-12-12 Tokyo Electron Ltd プラズマ処理装置

Also Published As

Publication number Publication date
JPS5132501B2 (enrdf_load_stackoverflow) 1976-09-13

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