JPS4951928A - - Google Patents

Info

Publication number
JPS4951928A
JPS4951928A JP9305772A JP9305772A JPS4951928A JP S4951928 A JPS4951928 A JP S4951928A JP 9305772 A JP9305772 A JP 9305772A JP 9305772 A JP9305772 A JP 9305772A JP S4951928 A JPS4951928 A JP S4951928A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9305772A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9305772A priority Critical patent/JPS4951928A/ja
Publication of JPS4951928A publication Critical patent/JPS4951928A/ja
Pending legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
JP9305772A 1972-09-16 1972-09-16 Pending JPS4951928A (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9305772A JPS4951928A (cs) 1972-09-16 1972-09-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9305772A JPS4951928A (cs) 1972-09-16 1972-09-16

Publications (1)

Publication Number Publication Date
JPS4951928A true JPS4951928A (cs) 1974-05-20

Family

ID=14071866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9305772A Pending JPS4951928A (cs) 1972-09-16 1972-09-16

Country Status (1)

Country Link
JP (1) JPS4951928A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57133514A (en) * 1981-02-06 1982-08-18 Sumitomo Special Metals Co Ltd Gap forming composite target and gap formation of magnetic head
JPH06172994A (ja) * 1992-12-09 1994-06-21 Kawasaki Heavy Ind Ltd 金属酸化物焼結体スパッタリングターゲット及びその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57133514A (en) * 1981-02-06 1982-08-18 Sumitomo Special Metals Co Ltd Gap forming composite target and gap formation of magnetic head
JPH06172994A (ja) * 1992-12-09 1994-06-21 Kawasaki Heavy Ind Ltd 金属酸化物焼結体スパッタリングターゲット及びその製造方法

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