JPS4951867U - - Google Patents

Info

Publication number
JPS4951867U
JPS4951867U JP9574372U JP9574372U JPS4951867U JP S4951867 U JPS4951867 U JP S4951867U JP 9574372 U JP9574372 U JP 9574372U JP 9574372 U JP9574372 U JP 9574372U JP S4951867 U JPS4951867 U JP S4951867U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9574372U
Other languages
Japanese (ja)
Other versions
JPS5127246Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9574372U priority Critical patent/JPS5127246Y2/ja
Publication of JPS4951867U publication Critical patent/JPS4951867U/ja
Application granted granted Critical
Publication of JPS5127246Y2 publication Critical patent/JPS5127246Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9574372U 1972-08-17 1972-08-17 Expired JPS5127246Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9574372U JPS5127246Y2 (cg-RX-API-DMAC7.html) 1972-08-17 1972-08-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9574372U JPS5127246Y2 (cg-RX-API-DMAC7.html) 1972-08-17 1972-08-17

Publications (2)

Publication Number Publication Date
JPS4951867U true JPS4951867U (cg-RX-API-DMAC7.html) 1974-05-08
JPS5127246Y2 JPS5127246Y2 (cg-RX-API-DMAC7.html) 1976-07-10

Family

ID=28292332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9574372U Expired JPS5127246Y2 (cg-RX-API-DMAC7.html) 1972-08-17 1972-08-17

Country Status (1)

Country Link
JP (1) JPS5127246Y2 (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5117272A (ja) * 1974-08-05 1976-02-12 Toray Industries Renzokusupatsutaringuhoho
JPS5252133A (en) * 1975-07-11 1977-04-26 Tokuda Seisakusho Continuous film coating apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5117272A (ja) * 1974-08-05 1976-02-12 Toray Industries Renzokusupatsutaringuhoho
JPS5252133A (en) * 1975-07-11 1977-04-26 Tokuda Seisakusho Continuous film coating apparatus

Also Published As

Publication number Publication date
JPS5127246Y2 (cg-RX-API-DMAC7.html) 1976-07-10

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