JPS4949576A - - Google Patents
Info
- Publication number
- JPS4949576A JPS4949576A JP9244472A JP9244472A JPS4949576A JP S4949576 A JPS4949576 A JP S4949576A JP 9244472 A JP9244472 A JP 9244472A JP 9244472 A JP9244472 A JP 9244472A JP S4949576 A JPS4949576 A JP S4949576A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9244472A JPS5321271B2 (ja�@�@) | 1972-09-14 | 1972-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9244472A JPS5321271B2 (ja�@�@) | 1972-09-14 | 1972-09-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4949576A true JPS4949576A (ja�@�@) | 1974-05-14 |
| JPS5321271B2 JPS5321271B2 (ja�@�@) | 1978-07-01 |
Family
ID=14054569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9244472A Expired JPS5321271B2 (ja�@�@) | 1972-09-14 | 1972-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5321271B2 (ja�@�@) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63202022A (ja) * | 1987-02-06 | 1988-08-22 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング | リゾグラフイによるパターンの形成のための露光マスク |
-
1972
- 1972-09-14 JP JP9244472A patent/JPS5321271B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63202022A (ja) * | 1987-02-06 | 1988-08-22 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング | リゾグラフイによるパターンの形成のための露光マスク |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5321271B2 (ja�@�@) | 1978-07-01 |