JPS4948276A - - Google Patents
Info
- Publication number
- JPS4948276A JPS4948276A JP47092441A JP9244172A JPS4948276A JP S4948276 A JPS4948276 A JP S4948276A JP 47092441 A JP47092441 A JP 47092441A JP 9244172 A JP9244172 A JP 9244172A JP S4948276 A JPS4948276 A JP S4948276A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gas-Filled Discharge Tubes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47092441A JPS4948276A (ja) | 1972-09-13 | 1972-09-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47092441A JPS4948276A (ja) | 1972-09-13 | 1972-09-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4948276A true JPS4948276A (ja) | 1974-05-10 |
Family
ID=14054493
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47092441A Pending JPS4948276A (ja) | 1972-09-13 | 1972-09-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4948276A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02177535A (ja) * | 1988-12-28 | 1990-07-10 | Matsushita Electron Corp | 半導体装置の製造方法 |
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1972
- 1972-09-13 JP JP47092441A patent/JPS4948276A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02177535A (ja) * | 1988-12-28 | 1990-07-10 | Matsushita Electron Corp | 半導体装置の製造方法 |