JPS4947293A - - Google Patents
Info
- Publication number
- JPS4947293A JPS4947293A JP8392872A JP8392872A JPS4947293A JP S4947293 A JPS4947293 A JP S4947293A JP 8392872 A JP8392872 A JP 8392872A JP 8392872 A JP8392872 A JP 8392872A JP S4947293 A JPS4947293 A JP S4947293A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8392872A JPS5523769B2 (cs) | 1972-08-22 | 1972-08-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8392872A JPS5523769B2 (cs) | 1972-08-22 | 1972-08-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4947293A true JPS4947293A (cs) | 1974-05-07 |
| JPS5523769B2 JPS5523769B2 (cs) | 1980-06-25 |
Family
ID=13816246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8392872A Expired JPS5523769B2 (cs) | 1972-08-22 | 1972-08-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5523769B2 (cs) |
-
1972
- 1972-08-22 JP JP8392872A patent/JPS5523769B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5523769B2 (cs) | 1980-06-25 |