JPS4946996A - - Google Patents

Info

Publication number
JPS4946996A
JPS4946996A JP8878672A JP8878672A JPS4946996A JP S4946996 A JPS4946996 A JP S4946996A JP 8878672 A JP8878672 A JP 8878672A JP 8878672 A JP8878672 A JP 8878672A JP S4946996 A JPS4946996 A JP S4946996A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8878672A
Other languages
Japanese (ja)
Other versions
JPS5533587B2 (oth
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8878672A priority Critical patent/JPS5533587B2/ja
Publication of JPS4946996A publication Critical patent/JPS4946996A/ja
Publication of JPS5533587B2 publication Critical patent/JPS5533587B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP8878672A 1972-09-06 1972-09-06 Expired JPS5533587B2 (oth)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8878672A JPS5533587B2 (oth) 1972-09-06 1972-09-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8878672A JPS5533587B2 (oth) 1972-09-06 1972-09-06

Publications (2)

Publication Number Publication Date
JPS4946996A true JPS4946996A (oth) 1974-05-07
JPS5533587B2 JPS5533587B2 (oth) 1980-09-01

Family

ID=13952516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8878672A Expired JPS5533587B2 (oth) 1972-09-06 1972-09-06

Country Status (1)

Country Link
JP (1) JPS5533587B2 (oth)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007516573A (ja) * 2003-05-15 2007-06-21 アクセリス テクノロジーズ インコーポレーテッド リボンビーム型イオン注入機のための高分析分離磁石

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5136638A (ja) * 1974-09-24 1976-03-27 Dowa Co Netsudentsuitojukikabaana

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5136638A (ja) * 1974-09-24 1976-03-27 Dowa Co Netsudentsuitojukikabaana

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007516573A (ja) * 2003-05-15 2007-06-21 アクセリス テクノロジーズ インコーポレーテッド リボンビーム型イオン注入機のための高分析分離磁石

Also Published As

Publication number Publication date
JPS5533587B2 (oth) 1980-09-01

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