JPS4946869A - - Google Patents
Info
- Publication number
- JPS4946869A JPS4946869A JP9002472A JP9002472A JPS4946869A JP S4946869 A JPS4946869 A JP S4946869A JP 9002472 A JP9002472 A JP 9002472A JP 9002472 A JP9002472 A JP 9002472A JP S4946869 A JPS4946869 A JP S4946869A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9002472A JPS5241721B2 (Direct) | 1972-09-09 | 1972-09-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9002472A JPS5241721B2 (Direct) | 1972-09-09 | 1972-09-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4946869A true JPS4946869A (Direct) | 1974-05-07 |
| JPS5241721B2 JPS5241721B2 (Direct) | 1977-10-20 |
Family
ID=13987108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9002472A Expired JPS5241721B2 (Direct) | 1972-09-09 | 1972-09-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5241721B2 (Direct) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5188172A (Direct) * | 1974-12-20 | 1976-08-02 |
-
1972
- 1972-09-09 JP JP9002472A patent/JPS5241721B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5188172A (Direct) * | 1974-12-20 | 1976-08-02 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5241721B2 (Direct) | 1977-10-20 |