JPS4946868A - - Google Patents

Info

Publication number
JPS4946868A
JPS4946868A JP9002372A JP9002372A JPS4946868A JP S4946868 A JPS4946868 A JP S4946868A JP 9002372 A JP9002372 A JP 9002372A JP 9002372 A JP9002372 A JP 9002372A JP S4946868 A JPS4946868 A JP S4946868A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9002372A
Other languages
Japanese (ja)
Other versions
JPS535601B2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9002372A priority Critical patent/JPS535601B2/ja
Publication of JPS4946868A publication Critical patent/JPS4946868A/ja
Publication of JPS535601B2 publication Critical patent/JPS535601B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP9002372A 1972-09-09 1972-09-09 Expired JPS535601B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9002372A JPS535601B2 (en:Method) 1972-09-09 1972-09-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9002372A JPS535601B2 (en:Method) 1972-09-09 1972-09-09

Publications (2)

Publication Number Publication Date
JPS4946868A true JPS4946868A (en:Method) 1974-05-07
JPS535601B2 JPS535601B2 (en:Method) 1978-03-01

Family

ID=13987084

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9002372A Expired JPS535601B2 (en:Method) 1972-09-09 1972-09-09

Country Status (1)

Country Link
JP (1) JPS535601B2 (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54112901U (en:Method) * 1978-01-27 1979-08-08
JPS55171802U (en:Method) * 1979-05-21 1980-12-10

Also Published As

Publication number Publication date
JPS535601B2 (en:Method) 1978-03-01

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